Murray broke Ferrer when he served for the second set at 5-4 and then saved a set point at 6-5 in the tiebreaker to seize the momentum on Centre Court. The match was suspended for about 25 minutes at 5-5 in the fourth set, and Murray once again proved stronger in the tiebreaker when play resumed. He converted his first match point with an ace.
Murray will play Jo-Wilfried Tsonga, who reached the semis for the second straight year by beating Philipp Kohlschreiber.
Murray is trying to become the first British man to win Wimbledon since Fred Perry in 1936.